Effective improvement of scanning resonance through dynamic optimization of the probe. (June 2021)

• Record Type: Journal Article
• Authors: Zheng, Weikang; Liu, Zhigang; Fu, Liyan; Guo, Junkang
• Is Part Of: Measurement. Volume 178(2021)
• Publication Date: 2021-06
• Subjects: Scanning probe -- Optimization -- Natural frequency -- Resonance; Weights and measures -- Periodicals; Measurement -- Periodicals; Measurement; Weights and measures; Periodicals; 530.8
• DOI: 10.1016/j.measurement.2021.109438
• Languages: English
• ISSNs: 0263-2241

Abstract

Graphical abstract: Highlights: The motion model of a three dimensional probe is got by Lagrangian dynamics. A probe with high natural frequency is obtained by multi-objective optimization. Resonance effect of the optimized probe is suppressed during high speed scanning. The resonance components caused by the linear guide is attenuated significantly. Abstract: Scanning probes are widely used in industry due to high precision and efficiency. However, the insufficient dynamic performance of the probe, especially the first-order natural frequency, makes the measurement results under high-speed scanning easily interfered by the resonance effect. Based on Lagrangian dynamic model of the probe, this paper proposes a multi-objective optimization method for the three-dimensional (3D) structure, including a two-dimensional (2D) elastic mechanism and a ceramic stylus, and obtains an optimized probe with highly increased first-order natural frequency and sensitivity. The evaluation of the probe dynamics and scanning-deviation prediction shows that the optimized probe has a higher upper velocity limit within the same allowable measurement deviation and a better tolerance to resonance. Compared with the original probe, the optimized probe significantly suppresses the low-amplitude and high-frequency resonance components caused by the axial runout of the linear guide and improve the quality of the system response signals.