Cite
HARVARD Citation
Savchuk, O. et al. (2021). Nonparametric estimation of SiC film residual stress from the wafer surface profile. Measurement. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Savchuk, O. et al. (2021). Nonparametric estimation of SiC film residual stress from the wafer surface profile. Measurement. p. . [Online].