Cite
HARVARD Citation
Watanabe, K. et al. (2021). Bonding of LiNbO3 and Si wafers at room temperature using Si nanolayers. Japanese journal of applied physics. p. . [Online].
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Watanabe, K. et al. (2021). Bonding of LiNbO3 and Si wafers at room temperature using Si nanolayers. Japanese journal of applied physics. p. . [Online].