Cite
HARVARD Citation
Rudolph, M. et al. (2021). On the electron energy distribution function in the high power impulse magnetron sputtering discharge. Plasma sources science & technology. p. . [Online].
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Rudolph, M. et al. (2021). On the electron energy distribution function in the high power impulse magnetron sputtering discharge. Plasma sources science & technology. p. . [Online].