Improving the densification of indium tin oxide targets via secondary cold isostatic pressing and oxygen exchange treatments. (October 2018)

• Record Type: Journal Article
• Authors: Mei, Fangsheng; Yuan, Tiechui; Li, Ruidi; Qin, Kai; Huang, Jingwei
• Is Part Of: Scripta materialia. Number 155(2018)
• Page Start: 109
• Page End: 113
• Publication Date: 2018-10
• Subjects: Indium tin oxide -- Densification -- Secondary cold isostatic pressing -- Oxygen exchange; Materials -- Periodicals; Metallurgy -- Periodicals; Metalen; Legeringen; Materiaalkunde; Metals, metalworking and machinery industries; Metals; Electronic journals; 620.11
• DOI: 10.1016/j.scriptamat.2018.06.030
• Languages: English
• ISSNs: 1359-6462

Abstract

Abstract: Traditional preparation technology is difficult to achieve near full densified indium tin oxide targets with thickness more than 10 mm. By introducing an anti-densification sintering model into studying the densification behavior of In2 O3 -SnO2 mixed powders, we proposed secondary cold isostatic pressing and oxygen exchange treatments to improve the densification of the targets by experiment. It is found that the application of secondary cold isostatic pressing and oxygen exchange treatments can increase the densification of targets and reduce the number and size of pores in sintered bodies effectively. Besides, two mechanism models were introduced to reveal the underlying causes. Graphical abstract: Unlabelled Image