Free‐standing aluminium nanowire arrays for high‐transmission plasmonic colour filters. (1st December 2014)

• Record Type: Journal Article
• Authors: Honma, Hiroaki; Takahashi, Kazuhiro; Fukuhara, Masashi; Ishida, Makoto; Sawada, Kazuaki
• Is Part Of: Micro & nano letters. Volume 9:Number 12(2014)
• Page Start: 891
• Page End: 895
• Publication Date: 2014-12-01
• Subjects: aluminium -- silicon -- nanowires -- elemental semiconductors -- plasmonics -- optical filters -- nanophotonics -- nanofabrication -- surface plasmons -- nanopatterning -- electron beam lithography -- nanolithography -- etching -- optical fabrication -- optical design techniques -- microactuators -- red shift -- visible spectra -- spectral line intensity; Si -- Al -- pixel size -- transmission light intensity -- MEMS comb‐drive actuator -- low‐power operation -- maximum measured transmittance -- black pixel -- red‐shift -- transmitted light peak wavelength -- RGB tunable colour filter -- microelectromechanical systems -- material configuration -- transmission peak position -- structural parameter -- sacrificial silicon etching -- lift‐off technique -- electron‐beam lithography -- surface plasmons -- red‐green‐blue colour filters -- high‐transmission plasmonic color filters -- free‐standing aluminium nanowire arrays; Nanotechnology -- Periodicals; Nanostructures -- Periodicals; Microtechnology -- Periodicals; 620.5
• DOI: 10.1049/mnl.2014.0423
• Languages: English
• ISSNs: 1750-0443

Abstract

Abstract : Presented is a fabrication process for the transmission of red–green–blue (RGB) colour filters based on surface plasmons (SPs) using aluminium (Al) nanowire arrays patterned through electron‐beam lithography and the lift‐off technique. An array of Al nanowires was deployed over a through hole formed by sacrificial silicon etching. The period of the Al nanowire arrays is the dominant structural parameter in determining the transmission peak position of SPs for a given material configuration. The Al nanowire arrays are designed with the same Al wire width under the assumption of operation using a microelectromechanical systems (MEMS) comb‐drive actuator for the realisation of an RGB tunable colour filter. The peak wavelength of the transmitted light was red‐shifted by increasing the period of the Al nanowire arrays from 450 to 600 nm, and RGB colours were demonstrated. A black pixel was produced using the 400 nm pitch Al nanowire array. The maximum measured transmittance of the peak wavelength was 56%. In addition, the number of nanowires sufficient for low‐power operation by a MEMS comb‐drive actuator was investigated and sufficient transmission light intensity was obtained from the pixel size of 10 µm 2, including 20 Al nanowires.