Cite
HARVARD Citation
Cheng, R. et al. (n.d.). A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging. Measurement science & technology. p. . [Online].
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Cheng, R. et al. (n.d.). A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging. Measurement science & technology. p. . [Online].