A 3-DOF sandwich piezoelectric manipulator with low hysteresis effect: Design, modeling and experimental evaluation. (September 2021)

• Record Type: Journal Article
• Authors: Su, Qi; Chen, Weishan; Deng, Jie; Tian, Xinqi; Liu, Yingxiang
• Is Part Of: Mechanical systems and signal processing. Volume 158(2021)
• Publication Date: 2021-09
• Subjects: Piezoelectric manipulator -- Hysteresis effect -- Three-degree of freedom -- Fast positioning -- Kinematic model; Structural dynamics -- Periodicals; Vibration -- Periodicals; Constructions -- Dynamique -- Périodiques; Vibration -- Périodiques; Structural dynamics; Vibration; Periodicals; 621
• DOI: 10.1016/j.ymssp.2021.107768
• Languages: English
• ISSNs: 0888-3270

Abstract

Highlights: A 3-DOF piezoelectric manipulator of compact size is modeled, fabricated and tested. The manipulator has a hysteresis of 1.53% under voltage of 300 V and frequency of 1 Hz. The manipulator has high resonant frequency and high structural stiffness. The open-loop working frequency is up to 50 Hz with tracking error less than 5%. The manipulator achieves a displacement resolution of 4.8 nm. Abstract: A novel 3-DOF piezoelectric manipulator was modeled, fabricated and tested in this work. The longitudinal deformation and the orthogonal bending deformations were used to achieve the motions along the Z, X and Y axes, respectively. A novel kinematic model was developed and verified by FEM simulation. A prototype was fabricated, the output displacement test, frequency response test, hysteresis and creep characters were investigated in sequence. The tested results stated that the maximum displacements of the manipulator were 13.4 μm, 13.3 μm and 3.1 μm in X, Y, Z direction, respectively. The resonant frequencies of the X, Y and Z axis were tested as 2.734 kHz, 2.758 kHz and 16.462 kHz, respectively. The hysteresis effect of the manipulator was just 1.53% under the voltage of 300 V and the frequency of 1 Hz. The tests of two-dimensional and three-dimensional circular trajectories were implemented to study the dynamic performances. The results showed that the maximum open-loop working frequency was up to 50 Hz with an error less than 5%. Prospectively, the manipulator could be applied to the precision positioning system with open-loop working and nano-positioning demands by virtue of its compact size, high resolution, high resonant frequency and low hysteresis effect.