Bandwidth controlled weakly connected MEMS resonators based narrowband filter. Issue 8 (23rd November 2020)

• Record Type: Journal Article
• Authors: Behzadi, Kobra; Baghelani, Masoud
• Is Part Of: IET circuits, devices & systems. Volume 14:Issue 8(2020)
• Page Start: 1265
• Page End: 1271
• Publication Date: 2020-11-23
• Subjects: micromechanical resonators -- band‐pass filters -- resonator filters; electrical tuning -- electrical stiffness -- bandwidth 450.0 kHz -- voltage 0.0 V to 20.0 V -- piezoelectric effect -- coupling beam stiffness -- bandpass filters -- weakly connected MEMS resonator -- bandwidth controlled MEMS resonator -- frequency shift -- fabrication process uncertainties -- resonance frequency -- ultra‐high frequency ranges -- microelectromechanical system resonator -- electrical control -- extremely high stiffness disk resonators -- low stiff coupling beam -- narrowband filter -- tuning DC voltage -- high bandwidth tuning ratio -- MEMS radial contour mode disk resonators -- applied electrical voltage; Electronic circuits -- Periodicals; Electronic systems -- Periodicals; 621.381505
• DOI: 10.1049/iet-cds.2020.0216
• Languages: English
• ISSNs: 1751-858X

Abstract

Abstract : Electrical tuning of bandwidth is critical for microelectromechanical system (MEMS) resonator‐based narrowband filters especially at ultra‐high frequency ranges and beyond. The resonance frequency of MEMS resonators is highly susceptible to fabrication process uncertainties and very small fabrication variations could result in significant shift in their resonance frequency. Although, disk resonators are the most acceptable candidates for implementing of resonators at GHz frequencies, according to their high stiffness, electrical tuning of these resonators and consequently the resulting filters is almost impossible. This study presents a novel tuning method for low velocity through anchor coupled MEMS radial contour mode disk resonators based on the coupling beam's stiffness tuning using the piezoelectric effect. As the results of this method, high bandwidth tuning ratio as 1:1.25 is achieved due to changing the tuning DC voltage from 0 to 20 V. This impressive result for a narrowband filter with 450 kHz of bandwidth is achieved due to changing the stiffness of low stiff coupling beam which is much easier to control in comparison with extremely high stiffness disk resonators. Various simulation results, as well as analytical works, verify the proposed approach.