Design and fabrication of cost‐effective side‐stem micromechanical disk resonator with large capacitive gap. Issue 10 (1st May 2014)

• Record Type: Journal Article
• Authors: Phamvan, Huan; Seok, Jongwon; Choi, Hae‐Jin
• Is Part Of: Electronics letters. Volume 50:Issue 10(2014)
• Page Start: 764
• Page End: 766
• Publication Date: 2014-05-01
• Subjects: micromechanical resonators -- biosensors -- Q‐factor; side‐stem micromechanical disk resonator -- mass detection biosensors -- capacitive gap -- cost‐effective fabrication -- elliptic contour‐mode -- quality factor -- Q‐factor -- ambient air condition -- resonance frequency -- vacuum environment -- frequency 5.971 MHz; Electronics -- Periodicals; 621.381
• DOI: 10.1049/el.2014.0665
• Languages: English
• ISSNs: 0013-5194

Abstract

Abstract : A high‐performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost‐effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 µm. The designed disk resonator operates in an elliptic contour‐mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.