Femtosecond laser fabricated polymer microring resonator for sensing applications. Issue 14 (1st July 2018)

• Record Type: Journal Article
• Authors: Zhang, D.; Men, L.; Chen, Q.
• Is Part Of: Electronics letters. Volume 54:Issue 14(2018)
• Page Start: 888
• Page End: 890
• Publication Date: 2018-07-01
• Subjects: optical polymers -- micro‐optics -- optical resonators -- optical fabrication -- high‐speed optical techniques -- refractive index measurement -- photoresists -- integrated optics -- temperature measurement -- light interferometry -- red shift -- microsensors -- polymerisation -- laser materials processing -- optical sensors; refractive index sensing -- refractive index sensitivity -- femtosecond laser fabricated polymer microring resonator -- sensing applications -- femtosecond laser two‐photon photopolymerisation -- resonance wavelength shift -- epoxy‐based negative photoresist SU‐8 -- temperature sensing -- interferometric pattern -- red shift -- blue shift; Electronics -- Periodicals; 621.381
• DOI: 10.1049/el.2017.4585
• Languages: English
• ISSNs: 0013-5194

Abstract

Abstract : A microring resonator realised by femtosecond laser two‐photon photopolymerisation in an epoxy‐based negative photoresist (SU‐8) is proposed and demonstrated, which is further proved to be capable of temperature and refractive index sensing by monitoring the shift of the resonance wavelength of the interferometric pattern. The experimental results indicate refractive index sensitivity of 12.50 nm/refractive index unit (redshift) and temperature sensitivity of −9.51 × 10 −2 nm/ o C (blueshift), respectively.