Thermodynamic control of MEMS meteorology pressure sensing element in low‐temperature application down to −45°C. Issue 7 (1st October 2017)

• Record Type: Journal Article
• Authors: Du, Lidong; Zhao, Zhan; Fang, Zhen; Feng, Yu; Yan, Jize
• Is Part Of: IET science, measurement & technology. Volume 11:Issue 7(2017)
• Page Start: 907
• Page End: 913
• Publication Date: 2017-10-01
• Subjects: meteorology -- calibration -- lumped parameter networks -- compensation -- thermodynamics -- pressure sensors -- microsensors; thermodynamic control -- MEMS meteorology pressure sensing element -- low‐temperature environment -- microelectromechanical systems chip -- heat compensation -- pulse‐width modulation -- proportional–integral–derivative algorithm -- thermal control -- COMSOL software -- lumped element model analysis -- pressure calibration -- temperature 50 degC; Measurement -- Periodicals; Electrical engineering -- Periodicals; Electronics -- Periodicals; Nanotechnology -- Periodicals; Electromagnetism -- Periodicals; Medical instruments and apparatus -- Periodicals; 621.3
• DOI: 10.1049/iet-smt.2017.0057
• Languages: English
• ISSNs: 1751-8822

Abstract

Abstract : In this study, the authors present an alternative method for poor accuracy of piezoresistive meteorology pressure sensing in low‐temperature environment (down to −45°C) by incorporating external thermodynamic control. In order to use the designed sensor in such a low‐temperature environment, the microelectromechanical systems (MEMS) chip itself has to be kept at 50°C, which is the most common used highest working temperature in meteorology field. The heat compensation is achieved by a pulse‐width modulation controlled heating resistor based on proportional–integral–derivative algorithm. The precision of thermal control was obtained at 50 ± 0.5°C during the bench test. The simulation results from COMSOL software are consisted with lumped element model analysis. Under the condition of environmental temperature down to −45°C, system achieved a maximum absolute error within ±0.5 hPa after pressure calibration.