A wave of integration: Phase error in multiplexing silicon waveguides is mitigated by ArF immersion lithography. Issue 6 (1st March 2013)
- Record Type:
- Journal Article
- Title:
- A wave of integration: Phase error in multiplexing silicon waveguides is mitigated by ArF immersion lithography. Issue 6 (1st March 2013)
- Main Title:
- A wave of integration
- Abstract:
- Is Part Of:
- Electronics letters. Volume 49:Issue 6(2013)
- Journal:
- Electronics letters
- Issue:
- Volume 49:Issue 6(2013)
- Issue Display:
- Volume 49, Issue 6 (2013)
- Year:
- 2013
- Volume:
- 49
- Issue:
- 6
- Issue Sort Value:
- 2013-0049-0006-0000
- Page Start:
- 377
- Page End:
- 377
- Publication Date:
- 2013-03-01
- Subjects:
- Si
elemental semiconductors -- immersion lithography -- integrated optics -- optical arrays -- optical design techniques -- optical fabrication -- optical waveguides -- silicon -- wavelength division multiplexing
phase error -- multiplexing silicon waveguides -- ArF immersion lithography -- compact silicon wire array waveguide -- wavelength division multiplexing -- silicon photonic applications -- optimisation -- manufacturing process -- LSI -- photonic integrated systems -- on‐chip data centres -- Si
Electronics -- Periodicals
621.381 - Journal URLs:
- http://digital-library.theiet.org/content/journals/el ↗
http://estar.bl.uk/cgi-bin/sciserv.pl?collection=journals&journal=00135194 ↗
https://ietresearch.onlinelibrary.wiley.com/loi/1350911x ↗
http://www.theiet.org/ ↗ - DOI:
- 10.1049/el.2013.0698 ↗
- Languages:
- English
- ISSNs:
- 0013-5194
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 3705.060000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 16404.xml