Flexible strain sensors based on electrostatically actuated graphene flakes. (8th June 2015)

• Record Type: Journal Article
• Authors: Fardindoost, Somayeh; Alipour, Akbar; Mohammadi, Saeed; Gokyar, Sayim; Sarvari, Reza; Iraji zad, Azam; Demir, Hilmi Volkan
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 7(2015:Jul.)
• Publication Date: 2015-06-08
• Subjects: graphene electromechanical resonator -- strain sensing -- flexible sensor; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/7/075016
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 µ m, a mechanical resonance frequency around 136 MHz with a quality factor ( Q ) of ~60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations.