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HARVARD Citation
Hotovy, I. et al. (n.d.). Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching. Journal of micromechanics and microengineering. p. . [Online].
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Hotovy, I. et al. (n.d.). Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching. Journal of micromechanics and microengineering. p. . [Online].