A novel MEMS actuator with large lateral stroke driven by Lorentz force. (22nd January 2015)

• Record Type: Journal Article
• Authors: Lv, Xingdong; Wei, Weiwei; Mao, Xu; Yang, Jinling; Yang, Fuhua
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 2(2015:Feb.)
• Publication Date: 2015-01-22
• Subjects: MEMS actuator -- Lorentz force -- large stroke -- linear control; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/2/025009
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 47 μ m was achieved with a magnetic field of 0.3 T and a driving current of 8 mA. The actuator can generate a large displacement under a low driving voltage and can easily be integrated with CMOS circuits. Lorentz force is proportional to the magnetic field and the driving current, which results in a linear dependence of the lateral displacement on the driving current.