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HARVARD Citation
Soleimani-Amiri, S. et al. (n.d.). 3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO2/Si and glass substrates. Journal of micromechanics and microengineering. p. . [Online].
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Soleimani-Amiri, S. et al. (n.d.). 3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO2/Si and glass substrates. Journal of micromechanics and microengineering. p. . [Online].