Erratum: Anisotropic etching on Si{1 1 0}: experiment and simulation for the formation of microstructures with convex corners. (23rd March 2015)

Record Type:: Journal Article
Title:: Erratum: Anisotropic etching on Si{1 1 0}: experiment and simulation for the formation of microstructures with convex corners. (23rd March 2015)
Main Title:: Erratum: Anisotropic etching on Si{1 1 0}: experiment and simulation for the formation of microstructures with convex corners
Authors:: Pal, Prem
Gosalvez, Miguel A
Sato, Kazuo
Hida, H
Xing, Yan
Abstract:
Is Part Of:: Journal of micromechanics and microengineering. Volume 25:Number 4(2015:Apr.)
Journal:: Journal of micromechanics and microengineering
Issue:: Volume 25:Number 4(2015:Apr.)
Issue Display:: Volume 25, Issue 4 (2015)
Year:: 2015
Volume:: 25
Issue:: 4
Issue Sort Value:: 2015-0025-0004-0000
Page Start:
Page End:
Publication Date:: 2015-03-23
Subjects:: Microelectromechanical systems -- Periodicals
Micromechanics -- Periodicals
621.38105
Journal URLs:: http://iopscience.iop.org/0960-1317 ↗
http://ioppublishing.org/ ↗
DOI:: 10.1088/0960-1317/25/4/049601 ↗
Languages:: English
ISSNs:: 0960-1317
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store
Ingest File:: 16409.xml