2D stepping drive for hyperspectral systems. (22nd May 2015)

• Record Type: Journal Article
• Authors: Endrödy, Csaba; Mehner, Hannes; Grewe, Adrian; Sinzinger, Stefan; Hoffmann, Martin
• Is Part Of: Journal of micromechanics and microengineering. Volume 25:Number 7(2015:Jul.)
• Publication Date: 2015-05-22
• Subjects: stepping drive -- inch-worm -- electrostatic actuation -- hyperspectral imaging -- microdrive -- xy-stage -- MOEMS; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/0960-1317/25/7/074002
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic actuators was designed resulting in a compact (1 cm 2 ) positioning system featuring a step size of about 15 µ m in a 170 µ m displacement range. The high payload (20 mg) as required for the pinhole array and the compact system design exceed the known electrostatic inch-worm-based microdrives.