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HARVARD Citation
McCoy, A. et al. (2015). The impact of porosity on the formation of manganese based copper diffusion barrier layers on low-κ dielectric materials. Journal of physics. p. . [Online].
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McCoy, A. et al. (2015). The impact of porosity on the formation of manganese based copper diffusion barrier layers on low-κ dielectric materials. Journal of physics. p. . [Online].