Characterisation of nanoparticles by means of high-resolution SEM/EDS in transmission mode. Issue 1 (January 2016)

• Record Type: Journal Article
• Authors: Hodoroaba, V-D; Rades, S; Salge, T; Mielke, J; Ortel, E; Schmidt, R
• Is Part Of: IOP conference series. Volume 109:Issue 1(2016)
• Publication Date: 2016-01
• Subjects: Materials science -- Periodicals; 620.1105
• DOI: 10.1088/1757-899X/109/1/012006
• Languages: English
• ISSNs: 1757-8981

Abstract

Abstract: Advances in scanning electron microscopy (SEM) enable the high-resolution imaging of single nanoparticles (NPs) with sizes well below 10 nm. The SEM analysis in transmission mode (T-SEM) of NPs on thin film supports has many benefits when compared to the analysis of NPs on bulk substrates. The enhanced material (mass - thickness) contrast of the T-SEM imaging mode is well suited for in-depth and, particularly valuable, to very accurate, traceable, lateral dimensional measurements of NPs. Compared to samples prepared on bulk substrates, T-SEM with energy dispersive X-ray spectroscopy (EDS) achieves a drastically improved spatial resolution of the emitted X-rays. The poor signal-to-noise ratio of the X-ray spectra emitted by a single nanoparticle (NP) can be improved by the use of high-sensitivity (high collection solid angle) silicon drift (SDD), energy-dispersive X-ray spectrometers (EDS). The EDS spectral imaging of a single NP with a spatial resolution below 10 nm has become possible. This is demonstrated by means of various examples of nanostructures. Advanced data processing of T-SEM/EDS results sets the stage for the automated classification of NPs by feature analysis. This method combines the detection of morphological structures of interest by image processing of T-SEM micrographs with the chemical classification by EDS.