Improving ZnO Nanorod Humidity Sensors with Pt Nanoparticle Adsorption. (10th March 2021)

• Record Type: Journal Article
• Authors: Chu, Yen-Lin; Young, Sheng-Joue; Ding, Ren-Jie; Chu, Tung-Te; Lu, Ting-Sung; Ji, Liang-Wen
• Is Part Of: ECS journal of solid state science and technology. Volume 10:Number 3(2021)
• Publication Date: 2021-03-10
• Subjects: Detector -- Semiconductors - II-VI -- Sensors; Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2162-8777/abeb53
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : In this study, we report the successful fabrication of humidity sensors from zinc oxide (ZnO) nanorods (NRs) modified with platinum (Pt) nanoparticles (NPs) on a glass substrate through a hydrothermal method at 90 °C for 6 h. The crystal and optical properties of the pure ZnO and Pt–ZnO NRs were investigated through field-emission scanning electron microscopy (FE-SEM), X-ray diffraction analysis (XRD), photoluminescence (PL), and high-resolution transmission electron microscopy (HR-TEM). The structures of the humidity sensors demonstrated high photo-to-dark current contrast ratios, and fast response and recovery times for relative humidity (RH) measurement. The Pt NPs-adsorbed ZnO NR RH sensor showed better performance than that of the pure ZnO NR RH sensor. Results indicate that RH-sensing property can effectively be improved by adsorbed Pt NPs.