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HARVARD Citation
Workie, T. et al. (2021). Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals. Japanese journal of applied physics. p. . [Online].
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Workie, T. et al. (2021). Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals. Japanese journal of applied physics. p. . [Online].