Surface roughness and crystallinity of silicon solar cells irradiated by ultraviolet femtosecond laser pulses. Issue 1 (11th November 2020)

• Record Type: Journal Article
• Authors: Nigo, Fumitaka; Hashida, Masaki; Tsukamoto, Masahiro; Sakabe, Shuji; Kusaba, Mitsuhiro
• Is Part Of: Electronics and communications in Japan. Volume 104:Issue 1(2021)
• Page Start: 3
• Page End: 9
• Publication Date: 2020-11-11
• Subjects: LIPSS -- nanostructures -- silicon solar cell -- silicon -- ultraviolet femtosecond laser; Electronics -- Periodicals; Telecommunication -- Periodicals; 621.6805
• DOI: 10.1002/ecj.12287
• Languages: English
• ISSNs: 1942-9533

Abstract

Abstract: Nano/microfabrication experiments on the surface of silicon solar cell are performed by ultraviolet femtosecond laser in the fluence range from 0.10 to 0.70 J/cm 2 . The surface morphology change of sample was observed by a laser scanning microscopy and a scanning electron microscope. The crystallinity of surface irradiated by laser pulses was evaluated by Raman spectroscopy. The ablation threshold for silicon was estimated to be 0.10 J/cm 2 . We successfully produced nano‐structures on the surface of silicon solar cell maintaining single‐crystalline with the irradiation at the laser fluence of 0.10 J/cm 2 .