Atmospheric‐pressure plasma‐enhanced chemical vapor deposition of nanocomposite thin films from ethyl lactate and silica nanoparticles. Issue 2 (9th October 2020)

• Record Type: Journal Article
• Authors: Milaniak, Natalia; Laroche, Gaétan; Massines, Françoise
• Is Part Of: Plasma processes and polymers. Volume 18:Issue 2(2021)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2020-10-09
• Subjects: atmospheric‐pressure plasma‐enhanced chemical vapor deposition -- dielectric barrier discharge -- frequency‐shift keying -- IR spectroscopy -- nanoparticles; Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.202000153
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract: Nanocomposite coatings are made by atmospheric‐pressure plasma‐enhanced chemical vapor deposition from ethyl lactate (EL) and silica nanoparticles (NPs) in a dielectric barrier discharge (DBD) using frequency‐shift keying (FSK) to alternate between 1‐ and 15‐kHz voltages. In situ plasma Fourier‐transform infrared spectroscopy (FTIR) and thin film FTIR, scanning electron microscopy, atomic force microscopy, and profilometry show that (i) 1 kHz DBD mainly deposits NPs, 15 kHz only polymerizes EL; (ii) the EL polymerization rate is the same in FSK and continuous modes; (iii) despite the 50/50 contribution of both frequencies, the NP deposit is three times faster in FSK mode than in 1 kHz DBD and compared with 1 and 15 kHz coatings, in the nanocomposite, NP Si–O–Si and EL C═O bonds per unit length are equal to 68% and 34%, respectively. In situ FTIR detects SiO2 NPs, their functionalization, and the formation of CO2 . Abstract : The deposition of silica nanoparticles (NPs) with ethyl lactate plasma polymer was obtained by frequency‐shift keying plasma modulation in a dielectric barrier discharge. A 1 kHz frequency deposited the NPs, while 15 kHz created a polymer matrix. Fourier‐transform infrared (FTIR) spectroscopy and scanning electron microscopy analysis confirmed that NPs are successfully embedded into the thin film in 1 kHz, while not being visible in the plasma phase. As 15 kHz frequency oscillations are too fast for the NPs to follow, consequently they are not embedded into the thin film but trapped in the plasma and visible in the plasma FTIR spectrum.