Cite
HARVARD Citation
Sumisaka, M. et al. (n.d.). Sputter deposition of ScAlN using large size alloy target with high Sc content and reduction of Sc content in deposited films. Japanese journal of applied physics. p. . [Online].
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Sumisaka, M. et al. (n.d.). Sputter deposition of ScAlN using large size alloy target with high Sc content and reduction of Sc content in deposited films. Japanese journal of applied physics. p. . [Online].