Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model. (16th March 2021)

• Record Type: Journal Article
• Authors: Yamashita, Yuya; Akiba, Takuya; Iwanaga, Toshihide; Yamaoka, Hidehiko; Date, Shuichi; Akatsuka, Hiroshi
• Is Part Of: Japanese journal of applied physics. Volume 60:Number 4(2021)
• Publication Date: 2021-03-16
• Subjects: excitation-kinetic model -- plasma diagnostics -- optical emission spectroscopic measurement -- collisional-radiative model; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/abe642
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: In this work, an optimization algorithm was proposed for plasma diagnostic modeling based on a statistical analysis of reduced population density distribution. The algorithm generates a diagnostic equation, whose input parameters are the radiant flux of the multi-optical emission lines, and output parameters are electron temperature T e, electron density N e, and electron energy distribution function (EEDF), based on the dependence of reduced population density on T e, N e, and EEDF. The argon collisional-radiative model and the generalized EEDF were applied for the analysis of the excitation-kinetics. In this study, the diagnostic error for the low-pressure inductively coupled plasma, the low-pressure microwave discharge surface wave plasma, and the atmospheric dielectric barrier discharge plasma were simulated. The simulated diagnostic errors were smaller than those of the previously reported model.