P‐13.8: Fabrication of Al2O3/alucone Nanolaminates Using ALD/MLD and its Application to OLED Encapsulation. (24th February 2021)

• Record Type: Journal Article
• Authors: Chen, Guixiong; Weng, Yalian; Zhang, Yongai; Wu, Chaoxing; Yan, Qun; Guo, Tailiang; Zhou, Xiongtu
• Is Part Of: Digest of technical papers. Volume 52(2021)Supplement 1
• Page Start: 649
• Page End: 651
• Publication Date: 2021-02-24
• Subjects: Thin film encapsulation -- atomic layer deposition (ALD) -- molecular atomic layer deposition (MLD) -- water vapor transmission rate (WVTR) -- OLED; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.14584
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Thin film encapsulation (TFE) is vital for flexible organic light‐emitting diodes (OLEDs). In this work, the Al2 O3 /alucone nanolaminates grown by atomic layer deposition (ALD) and molecular layer deposition (MLD) were investigated as TFE for OLEDs. It was found that alucone film with the suitable thickness could better flatten Al2 O3 film by filling the defects. The nanolaminates of 15/2.5 nm Al2 O3 / alucone had high density to minimize the pass of water vapor, and the barrier properties were improved with the increasing number of dyads. The water vapor transmission rate (WVTR) could reached 1.44×10 −4 g/m 2 /day with 5.5 dyads nanolaminates in a control environment of 25 °C, 60% RH. The lifetime (L/L0 =0.5) of a green OLED could reached more than 380h using 5dyads nanolaminates as encapsulation layer. The result indicated a promising encapsulation method to prolong the lifetime of OLED.