Fabrication of piezoresistive Si nanorod-based pressure sensor arrays: A promising candidate for portable breath monitoring devices. (February 2021)

• Record Type: Journal Article
• Authors: Ghosh, Ramesh; Song, Minho S.; Park, JunBeom; Tchoe, Youngbin; Guha, Puspendu; Lee, Wanhee; Lim, Yoonseo; Kim, Bosung; Kim, Sang-Woo; Kim, Miyoung; Yi, Gyu-Chul
• Is Part Of: Nano energy. Volume 80(2021)
• Publication Date: 2021-02
• Subjects: Si Nanorod -- Piezoresistivity -- Pressure sensor -- Breath detection; Nanoscience -- Periodicals; Nanotechnology -- Periodicals; Nanostructured materials -- Periodicals; Power resources -- Technological innovations -- Periodicals; Nanoscience; Nanostructured materials; Nanotechnology; Power resources -- Technological innovations; Periodicals; 621.042
• DOI: 10.1016/j.nanoen.2020.105537
• Languages: English
• ISSNs: 2211-2855

Abstract

Abstract: This paper reports on the controlled fabrication of a highly sensitive piezoresistive sensor by using Si nanorod (NR) arrays. An efficient, large-area, scalable strategy was adopted to fabricate the pressure sensors by incorporating chemically etched, high-aspect-ratio, vertical Si NR arrays between two thin Au layers. The piezoresistive properties corresponding to dimension- and position-controlled and randomly etched, closely packed, and thin Si NR arrays were exploited to fabricate the small, portable, and device-compatible pressure sensors. The Si-NR-based piezoresistive sensors exhibited a high sensitivity of 0.49 MPa −1, thereby demonstrating its superiority over other unconventional piezoresistive nanomaterials such as Si with different configurations of nanostructures. Furthermore, the sensors exhibited a large variation (~45%) in the current at a constant bias voltage of 2 V under a weak applied pressure corresponding to an inert gas flow of 5 sccm. The excellent pressure sensing performance of the piezoresistive Si NRs enabled the efficient detection of changes corresponding to the human breathing pattern. In particular, the key advantages of such pressure sensors is the simple, inexpensive, and scalable fabrication process; high sensitivity with ultra-low-pressure detection; and excellent ambient stability (>several months) with a high durability pertaining to more than 1, 000 cycles of pressure loading/unloading. Furthermore, we demonstrated the ability of the pressure sensor to act as a portable human breath sensor to monitor respiratory parameters in a noninvasive and personalized manner. The results can provide direction for the realization of next-generation breath-sensing gadgets and other leading-edge applications in the domain of electronic and healthcare devices. Graphical Abstract: ga1 Highlights: Chemically etched, dimension- and position-controlled Si nanorod arrays are utilized as pressure sensors. Piezoresistivity in mesoporous Si nanorod is revealed to achieve a high-pressure sensitivity. The pressure sensor detects a tiny flow of inert gas efficiently. Demonstrated the pressure sensor's ability to act as a portable human breath sensor.