A reliability model for a wafer FAB. Issue 1 (1st January 2017)

• Record Type: Journal Article
• Authors: Jang, Joong S.; Park, Sang C.
• Editors: Wu, Chaoqun
• Is Part Of: Cogent engineering. Volume 4:Issue 1(2017)
• Publication Date: 2017-01-01
• Subjects: reliability model -- FAB -- failure rate -- reliability function -- simulation; Engineering -- Periodicals; Technology -- Periodicals; Engineering; Technology; Periodicals; 620
• DOI: 10.1080/23311916.2017.1340817
• Languages: English
• ISSNs: 2331-1916

Abstract

Abstract: Proposed in this paper is a new reliability model for a wafer fabrication plant (FAB). The reliability prediction of a FAB is essential for various activities; feasibility evaluation, comparing competing designs, identifying potential reliability problems, planning maintenance and logistic support strategies, and input to other studies such as life-cycle cost analysis or order selection. The conventional reliability model, however, is not appropriate for a FAB because of inherent attributes of the manufacturing system; concurrent production of various products, reentrant material flows, and the recipe arrangement problem. To overcome this problem, this paper proposes a new reliability model of a FAB consisting of three reliability functions; reliability function of an entire FAB, reliability functions of tool groups, and reliability functions of FAB tools. To demonstrate the proposed reliability model, a simulation model is constructed based on a wafer FAB data-set. The simulation experiments are carried out with commercial software MOZART®.