(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics. (23rd July 2018)

• Record Type: Journal Article
• Authors: Ishihara, Ryoichi; Trifunovic, Miki; Sberna, Paolo; Shimoda, Tatsuya
• Is Part Of: ECS transactions. Volume 86:Number 11(2018)
• Page Start: 47
• Page End: 55
• Publication Date: 2018-07-23
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/08611.0047ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350°C of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.