(Invited) Understanding and Controlling Electrochemical Effects in Wet Processing. (11th September 2015)

• Record Type: Journal Article
• Authors: Raghavan, Srini; Chiang, Chieh-Chun
• Is Part Of: ECS transactions. Volume 69:Number 8(2015)
• Page Start: 3
• Page End: 14
• Publication Date: 2015-09-11
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/06908.0003ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : Electrochemical techniques have long been used in understanding and improving the performance of various wet chemical processing steps such as etching, cleaning, passivation and rinsing used in integrated circuit (IC) manufacturing. The objective of this paper is to provide a few examples of how electrochemical techniques can be used to probe some important areas in wet processing. It is not intended to be an exhaustive review of techniques and problems reported in the literature.