(Invited) Si Photonics and Recent Challenges for on-Chip WDM. (14th September 2015)

• Record Type: Journal Article
• Authors: Wada, Kazumi; Zhang, Z.; Yako, M.; Ju, K.; Kawai, N.J.
• Is Part Of: ECS transactions. Volume 69:Number 10(2015)
• Page Start: 39
• Page End: 46
• Publication Date: 2015-09-14
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/06910.0039ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : The present paper proposes a new platform of Si photonics for on-chip dense wavelength division multiplexing (DWDM). The proposed SiNx platform deposited by physical vapor deposition (PVD-SiNx ) is robust against thermal fluctuation on a Si chip because of its small thermo-optics coefficient of SiNx . The presented platform can be fabricated in the CMOS back-end-of-line and only needs bulk Si wafers.