CMOS and NEMS Hybrid Architectures. (14th September 2015)

• Record Type: Journal Article
• Authors: Ernst, Thomas; Ouerghi, Issam; Ludurczak, Willy; Arcamone, Julien; Duraffourg, Laurent; Ollier, Eric; Philippe, Julien; Hentz, Sébastien
• Is Part Of: ECS transactions. Volume 69:Number 10(2015)
• Page Start: 253
• Page End: 258
• Publication Date: 2015-09-14
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/06910.0253ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : This paper reviews various realizations in the field of monolithic integration of Nano-Electro-Mechanical-Systems (NEMS) with CMOS. Such integrated solutions are of great interest in emerging domains as chemical analysis and life science. Co-integration enables to address a large number of sensors or to achieve enhaned sensitivity thanks to a high signal to noise ratio.