(Invited) Multifunctional Technology with Monolithic Integrated THz-, Photonic- and µ-Fluidic Modules. (14th September 2015)

• Record Type: Journal Article
• Authors: Mai, Andreas; Lischke, Stefan; Wietstruck, Matthias; Zimmermann, Lars; Kaynak, Mehmet; Tillack, Bernd
• Is Part Of: ECS transactions. Volume 69:Number 10(2015)
• Page Start: 47
• Page End: 54
• Publication Date: 2015-09-14
• Subjects: Electrochemistry -- Periodicals; Electrochemistry; Periodicals; Electronic journals; Electronic journal; 541.37
• DOI: 10.1149/06910.0047ecst
• Languages: English
• ISSNs: 1938-5862

Abstract

Abstract : In this paper we present a multifunctional technology platform with different monolithic integrated modules like THz devices, i.e. complementary SiGe heterojunction bipolar transistors, silicon photonics components in particular Ge-PIN photo detectors and finally the wafer-level integration of µ-fluidic channels for sensor applications. Challenges during the monolithic integration of these different modules were reviewed and necessary process adaptations discussed in order to enable a co-integration.