Cite
HARVARD Citation
Hutchinson, B. et al. (2015). Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition. ECS transactions. pp. 269-275. [Online].
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Hutchinson, B. et al. (2015). Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition. ECS transactions. pp. 269-275. [Online].