Cross‐Sectional Investigation of Multihigh‐Energy Proton‐Implanted Single Crystalline Diamond. Issue 1 (15th May 2020)

• Record Type: Journal Article
• Authors: Gong, Jintao; Ansari, Kambiz; Jin, Huining; van Kan, Jeroen Anton
• Other Names: Kuznetsov Andrej guestEditor.; Dangtip Somsak guestEditor.; Intarasiri Saweat guestEditor.
• Is Part Of: Physica status solidi. Volume 218:Issue 1(2021)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2020-05-15
• Subjects: cross-sectional analyses -- proton beam implantation -- Raman spectroscopy mapping -- single crystalline diamond -- transport of ions in matter simulations; Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.202000102
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : Comprehending the implantation‐related characteristic quantities of multihigh‐energy proton irradiation of diamond is of significant technological interest for sensing applications, fabrication of 3D photonic crystals, and color centers (e.g., NV − center)‐based quantum computing. Herein, proton‐projected ranges and defect distributions in the (010) plane ( Y ‐normal plane) of microwave plasma chemical vapor deposition (MPCVD)‐grown diamond irradiated with 0.5–2.0 MeV proton (H + or molecular H 2 + ions) in a nonchanneling (near [001], Z ‐axis) direction, are experimentally measured via cross‐sectional optical microscopy and high‐resolution confocal Raman spectroscopy mapping. It is found that the projected ranges of the experimental findings and the simulation results indicate good consistencies, whereas there is considerable disagreement between them in regards to longitudinal straggling and lateral straggling. Based on the comparisons and analyses, a clear view of protons implanted in single crystalline diamond in the high‐energy range theoretically and experimentally is obtained. Abstract : Herein, an insight into understanding the consistency and the disagreement between experimental results and Monte–Carlo‐based transport of ions in matter (TRIM) simulations of single crystalline diamond implanted by multihigh‐energy protons is provided, thus paving the way for the further development of 3D diamond‐based nonlinear crystals fabrication and photonic components manufacturing.