Mechanical failure dependence on the electrical history of lead zirconate titanate thin films. Issue 4 (April 2021)

• Record Type: Journal Article
• Authors: Coleman, K.; Ritter, M.; Bermejo, R.; Trolier-McKinstry, S.
• Is Part Of: Journal of the European Ceramic Society. Volume 41:Issue 4(2021)
• Page Start: 2465
• Page End: 2471
• Publication Date: 2021-04
• Subjects: Ferroelectric properties (c) -- Fracture (c) -- Mechanical properties (c) -- Piezoelectric properties (c) -- PZT (d); Ceramic materials -- Periodicals; Composite materials -- Periodicals; Matériaux céramiques -- Périodiques; Composites -- Périodiques; Ceramic materials; Composite materials; Periodicals; Electronic journals; 666.05
• DOI: 10.1016/j.jeurceramsoc.2020.11.002
• Languages: English
• ISSNs: 0955-2219

Abstract

Abstract: Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples ( σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples ( σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm ( σ 0 ∼ 433 ± 30 MPa). in situ εr and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.