Direct patterning of Cu microstructures using femtosecond laser-induced CuO nanoparticle reduction. (1st May 2015)

• Record Type: Journal Article
• Authors: Arakane, Shun; Mizoshiri, Mizue; Hata, Seiichi
• Is Part Of: Japanese journal of applied physics. Volume 54:Number 6(2015:Jun.)Supplement 1
• Publication Date: 2015-05-01
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.54.06FP07
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Cu-based microstructures were directly patterned using femtosecond laser-induced CuO nanoparticle reduction. CuO nanoparticle-based solution, consisting CuO nanoparticles, ethylene glycol, and polyvinylpyrrolidone, was spin-coated on glass substrates. Microstructures were formed by irradiating focused femtosecond laser pulses. Cu and Cu2 O peak intensities were observed in the X-ray diffraction (XRD) spectra of the microstructures. Compared to single scan, the Cu peak intensities increased by double scan. This result suggests that double scan is effective for increasing the amount of Cu from CuO nanoparticle solution. Cu- and Cu2 O-rich microstructures were formed selectively by controlling laser irradiation conditions. The resistivity of the Cu-rich microstructures was estimated by 528 µΩ m which was 10 4 times and 10 times larger than the values of Cu and Cu2 O, respectively. This large resistivity could be applied for microheaters.