Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating (LPH). (28th February 2021)

• Record Type: Journal Article
• Authors: Niu, Yunsong; Xing, Lingling; Yang, Feng; Li, Huawei; Chen, Minghui; Zhu, Shenglong; Wang, Fuhui
• Is Part Of: Journal of materials science & technology. Volume 65(2021)
• Page Start: 7
• Page End: 17
• Publication Date: 2021-02-28
• Subjects: Sputtered Ta coating -- Phase structure -- Laser pulse heating -- Inter-connected zone (ICZ) -- Heat-affected zone (HAZ) -- Ablation; Metals -- Periodicals; Materials science -- Periodicals; Materials science; Metals; Periodicals; 620.1105
• DOI: 10.1016/j.jmst.2020.04.067
• Languages: English
• ISSNs: 1005-0302

Abstract

Abstract: Phase structure of sputtered Ta coating in the negative glow space and LPH effect were explored. The whole coating/substrate system is substrate → physically gas-absorbed Fe surface → oxygen-enriched TaO x layer → amorphous Ta → α and β dual phase → single α phase. After LPH course, microstructure of Ta coating shows intact, only a few cracks emerge after 100 laser pulses, exhibiting thin HAZ but thick Fe/Ta ICZ, without martensitic transformation. For the electrodeposited Cr coating, continuous thermal stresses produce many extra micro-crack, substrate oxidation and martensitic transformation, leading to crack propagations and final bulk delamination, without any ICZ.