Evaluation of Size Distribution Measurement Methods for Sub-100 nm Colloidal Silica Nanoparticles and Its Application to CMP Slurry. (21st May 2019)

• Record Type: Journal Article
• Authors: Shin, Cheolmin; Choi, Jinhak; Kwak, Donggeon; Kim, Juhwan; Yang, Jichul; Chae, Seung-ki; Kim, Taesung
• Is Part Of: ECS journal of solid state science and technology. Volume 8:Number 5(2019)
• Page Start: P3195
• Page End: P3200
• Publication Date: 2019-05-21
• Subjects: Electrochemical Engineering; Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2.0261905jss
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : Various methods such as transmission electron microscopy, scanning electron microscopy, dynamic light scattering (DLS), and scanning mobility particle sizer were utilized to measure size distributions for sub-100 nm colloidal silica. Compared to electron micrographs, hydrodynamic diameter of sample is dependent on its concentration from ∼60 nm to ∼90 nm and it is difficult to measure the poly dispersed nanoparticles and analyze its own properties due to limitation of DLS method, whereas, nano nebulizer (NN)-SMPS method distinguished two different size nanoparticles (51 nm and 82 nm) perfectly and is considerably stable to alternations of concentration and dispersity.