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HARVARD Citation
Shima, K. et al. (2019). Identification of Film-Forming Species during SiC-CVD of CH3SiCl3/H2 by Exploiting Deep Microtrenches. ECS journal of solid state science and technology. pp. P423-P429. [Online].
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Shima, K. et al. (2019). Identification of Film-Forming Species during SiC-CVD of CH3SiCl3/H2 by Exploiting Deep Microtrenches. ECS journal of solid state science and technology. pp. P423-P429. [Online].