Communication—Black GaAs with Sub-Wavelength Nanostructures Fabricated via Lithography-Free Metal-Assisted Chemical Etching. (21st June 2019)

• Record Type: Journal Article
• Authors: Wilhelm, Thomas S.; Kolberg, Alex P.; Baboli, Mohadeseh A.; Abrand, Alireza; Bertness, Kris A.; Mohseni, Parsian K.
• Is Part Of: ECS journal of solid state science and technology. Volume 8:Number 6(6019)
• Page Start: Q134
• Page End: Q136
• Publication Date: 2019-06-21
• Subjects: Energy Conversion - Photovoltaics -- Etching -- Semiconductors - III-V -- Black GaAs -- Metal-Assisted Chemical Etching -- Nanostructures; Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2.0311906jss
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : A practical nanofabrication process is detailed for the generation of black GaAs. Discontinuous films of Au nanoparticles are electrodeposited onto GaAs substrates to catalyze site-specific etching in a solution consisting of KMnO4 and HF via the metal-assisted chemical etching. This provides a solution-based and lithography-free method for fabricating sub-wavelength nanostructure arrays that exhibit solar-weighted reflectance approaching 4%. This two-step benchtop process can be performed at room-temperature without lithography, vacuum instrumentation, or epitaxy, providing a high-throughput nanotexturing approach for photovoltaics applications.