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HARVARD Citation
Shen, J. et al. (2017). AFM and SEM Study on Crystallographic and Topographical Evolution of Wet-Etched Patterned Sapphire Substrates (PSS): I. Cone-Shaped PSS Etched in Sulfuric Acid and Phosphoric Acid Mixture (3:1) at 230°C. ECS journal of solid state science and technology. pp. R24-R34. [Online].