Cite
HARVARD Citation
Chen, C. et al. (2016). Impacts of Dislocations on the Anisotropic Etching of Ge/Si for Suspended Ge Membrane. ECS journal of solid state science and technology. pp. P197-P201. [Online].
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Chen, C. et al. (2016). Impacts of Dislocations on the Anisotropic Etching of Ge/Si for Suspended Ge Membrane. ECS journal of solid state science and technology. pp. P197-P201. [Online].