Cite
HARVARD Citation
Beche, E. et al. (2015). Direct Bonding Mechanism of ALD-Al2O3 Thin Films. ECS journal of solid state science and technology. pp. P171-P175. [Online].
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Beche, E. et al. (2015). Direct Bonding Mechanism of ALD-Al2O3 Thin Films. ECS journal of solid state science and technology. pp. P171-P175. [Online].