Active matrix monolithic micro‐LED full‐color micro‐display. Issue 1 (24th August 2020)

• Record Type: Journal Article
• Authors: Zhang, Xu; Qi, Longheng; Chong, Wing Cheung; Li, Peian; Tang, Chak Wah; Lau, Kei May
• Is Part Of: Journal of the Society for Information Display. Volume 29:Issue 1(2021)
• Page Start: 47
• Page End: 56
• Publication Date: 2020-08-24
• Subjects: active matrix -- full‐color -- GaN‐on‐Si -- micro‐display -- micro‐LED -- monolithic; Information display systems -- Periodicals; 621.38154205
• DOI: 10.1002/jsid.962
• Languages: English
• ISSNs: 1071-0922

Abstract

Abstract: An active matrix monolithic micro‐LED full‐color micro‐display with a pixel density of 317 ppi is demonstrated. Starting from large‐scale and low‐cost GaN‐on‐Si epilayers, monolithic 64 × 36 blue micro‐LED arrays are fabricated and further transformed to full‐color micro‐displays by applying a photo‐patternable color conversion layer. This full‐color fabrication scheme shows feasible manufacturability, suggesting a potential for volume production of micro‐LED full‐color micro‐display. Abstract : Combining the large‐scale and low‐cost GaN‐on‐Si epilayers together with a lithography‐based QDs‐PR patterning method, an active‐matrix monolithic full‐color LED micro‐display was demonstrated with a resolution of 32 × 18, a pitch size of 80× 80 μm and a pixel density of 317 ppi.