Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor. (1st January 2021)

• Record Type: Journal Article
• Authors: Li, Hongfang; Li, Yahui; Wang, Kai; Lai, Liyan; Xu, Xiaoxue; Sun, Bin; Yang, Zhuoqing; Ding, Guifu
• Is Part Of: International journal of hydrogen energy. Volume 46:Number 1(2021)
• Page Start: 1434
• Page End: 1445
• Publication Date: 2021-01-01
• Subjects: Hydrogen sensor -- Palladium coated microcantilever -- Palladium-based driver -- High-performance piezoresistor; Hydrogen as fuel -- Periodicals; Hydrogène (Combustible) -- Périodiques; Hydrogen as fuel; Periodicals; 665.81
• DOI: 10.1016/j.ijhydene.2020.10.013
• Languages: English
• ISSNs: 0360-3199

Abstract

Abstract: A novel resistive chemical-mechanical sensor for hydrogen gas detection was designed and manufactured by using MEMS processing technology. The sensor combines a composite piezoresistor of silver nanowires-polyimide and a palladium sputtered microcantilever, and the optimized structure of which has been obtained through theoretical and simulation analysis. With a series of experimental testing, the fabricated sensor achieved the ultra-high sensitivity of 2825, 8071, 28250 and 47083 for hydrogen detection at the concentration of 0.4%, 0.8%, 1.2%, 1.6% and 2.0%, respectively. The ultra-high sensitive detection for hydrogen was enabled from the synergistic function of both the surface resistance effect between the palladium coated cantilever and silver nanowires-polyimide piezoresistor, and the bulk resistance effect of the silver nanowires-polyimide piezoresistor. In addition, the sensor also demonstrates excellent stability, which has high potential for practical hydrogen gas detection. Graphical abstract: Image 1 Highlights: A novel MEMS resistive hydrogen sensor of ultrahigh sensitivity was designed. Sensor integrated palladium-based microcantilever with high sensitive piezoresistor. Ultrahigh sensitivity of 2825, 47083 at 0.4%, 2.0% H2 is respectively detected. Sensing mechanism is synergistic function of surface and bulk resistance effect.