Optical properties of dry etched vertically aligned silicon structures with different geometry. (December 2020)

• Record Type: Journal Article
• Authors: Vyacheslavova, E A; Morozov, I A; Gudovskikh, A S; Uvarov, A V; Baranov, A I; Kudryashov, D A
• Is Part Of: Journal of physics. Volume 1695(2020)
• Publication Date: 2020-12
• Subjects: Physics -- Congresses; 530.5
• DOI: 10.1088/1742-6596/1695/1/012085
• Languages: English
• ISSNs: 1742-6588

Abstract

Abstract: In this paper, we study the effect of the height and diameter of vertically aligned silicon structures on their optical properties. Structures with different geometry were formed using nanosphere lithography and dry etching. Nanosphere lithography was realized with 0.9 and 2 μm latex spheres. The etching process was carried out through a formed mask (template) composed of 0.9 and 2 μm latex spheres, respectively. The diameter of the spheres and the etching time determined the size of the formed structures and their optical properties. A significant reduction of the total reflection with height as well as blue shift of the minimum with diameter decrease were observed.