Preparation of iridium metal films by spray chemical vapor deposition. (2020)

• Record Type: Journal Article
• Authors: Seki, Yoshiyuki; Sawada, Yutaka; Funakubo, Hiroshi; Kawano, Kazuhisa; Oshima, Noriaki
• Is Part Of: MRS advances. Volume 5:Number 31/32(2020)
• Page Start: 1681
• Page End: 1685
• Publication Date: 2020
• Subjects: chemical vapor deposition (CVD) (deposition), -- Ir; Electrical engineering -- Congresses; Physics -- Congresses; Materials -- Research -- Congresses; Materials science -- Congresses; 620.11
• DOI: 10.1557/adv.2020.99
• Languages: English
• ISSNs: 2059-8521

Abstract

Abstract: Metal Ir films were prepared by spray chemical vapor deposition (CVD) in air from an Ir precursor, (1, 3-cyclohexadiene)(ethylcyclopentadienyl)iridium, Ir(EtCp)(CHD). Film deposition was ascertained at 270–430°C on a SiO2 /Si substrate and the deposition rate increased with the deposition temperature but was saturated above 330°C. The obtained films consisted of Ir metal without any iridium oxide impurity irrespective of the deposition temperature. Films tended to orient to (111) with increasing deposition temperature. Resistivity of these Ir films decreased with increasing film thickness and reached to values on the order of 10 -6 Ω・cm, which was the same order of the values for bulk Ir metal. Good step coverage was observed for the Ir metal films deposited at 270°C and 330°C. This shows that the simple spray CVD process in air is a good candidate for depositing Ir metal films with good conductivity and step coverage.